The Dutch company said demand remained strong as major chip makers, such as TSMC Samsung and Intel are pressing to expand production.
Chief Executive Officer Peter Wennink said. "Everybody is working extremely hard, us and our suppliers, to actually produce ... more machines. It's all driven by basically what we are seeing today which is the digital revolution."
ASML reported orders worth 4.9 billion euro for its extreme ultraviolet (EUV) machines used to manufacture advanced chips.
"Clients are structurally increasing capacity on the back of the digitalisation wave", ING analyst Marc Hesselink wrote in a note. "Overall there is a very positive tone on demand for 2021 and beyond."
ASML, which reported second-quarter net profit up 38 percent at 1.02 billion euro ($1.2 billion), lifted its 2021 sales growth outlook to 35 percent.
It said it would buy back nine billion euro worth of its own shares by the end of 2022, replacing its almost finished six billion euro buyback launched last year.